C-2 Micro systems and machine elements

[P-21] Characterization of High-speed Polishing System with Small Rectangular Polisher

〇Shinsuke Matsui¹、Kouta Hiroshima¹、Harusihige Suzuki¹、Atsunobu Une² (1.Chiba Institute Technology、2.professor emeritus at National Defense academy)

キーワード：Polishing、pad groove、aspherical