D-2 Surface metrologies of nano-scale structures

[P-24] Stable replication technique of anti-reflection structure using high-hardness and anti-fouling UV curable resin

〇Daiki Okazaki¹、Tadashi Ando¹、Shin Hiwasa²、Jun Taniguchi¹ (1.Tokyo University of Science、2.Autex Inc.)

キーワード：Functional surface、Moth-eye structure、Glassy carbon、Replica mold、UV-curable resin