ICPE2020

講演情報

Poster Sessions

F-1 Advanced surface processings

[P-28] High-rate Preparation of Hydrophobic Fluorocarbon Film from CF4 Feedstock Gas by Solid Source Aided Plasma Chemical Vapor Deposition Technique

〇Hiromichi Nakatsuka1、Rei Tanaka1、Hiroaki Kakiuchi1、Kiyoshi Yasutake1、Hiromasa Ohmi1 (1.Osaka University)

キーワード:Functional surface、fluorocarbon、hydrophobic、high-rate、CVD