B-3 Micro/Nano machining and figurings

[P-8] Investigation on Resolution of 1:1 Projection Exposure Using an Element Lens of Gradient-Index Lens Array

〇Hiroshi Kobayashi¹, Wataru Sakakibara¹, Yukihiro Domon¹, Toshiyuki Horiuchi¹ (1.Tokyo Denki University)

Keywords:Engineering、gradient-index lens、exposure system、element lens、