09:00 〜 09:30
*Florian Gstrein1,2 (1. Intel, 2. Components Research)
EUV Lithography
2022年6月29日(水) 09:00 〜 10:40 EUV Lithography (A5)
Chairman:Takeo Watanabe(University of Hyogo), Shinji Yamakawa(University of Hyogo)
09:00 〜 09:30
*Florian Gstrein1,2 (1. Intel, 2. Components Research)
09:30 〜 10:00
Florian Kaefer1, Zoey Meng2, Rachel Segalman2, *Christopher Ober1 (1. Cornell University, 2. University of California at Santa Barbara)
10:00 〜 10:30
*Patrick Naulleau1 (1. Lawrence Berkeley National Laboratory)
10:30 〜 10:40