The 39th International Conference of Photopolymer Science and Technology

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Directed Self Assembly (DSA)

[1A301-05] Directed Self Assembly (DSA)

Tue. Jun 28, 2022 2:00 PM - 4:00 PM Directed Self Assembly (DSA) (A3)

Chairman:Seiji Nagahara(Tokyo Electron Ltd.), Teruaki Hayakawa(Tokyo Institute of Technology)

2:00 PM - 2:40 PM

[1A301] DSA and Patterning Ecosystem Enablement [Keynote Lecture]

*Chandra Sarma1 (1. Intel Corp)