The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

EUV Lithography

[2A508-13] EUV Lithography III

2022年6月29日(水) 13:50 〜 16:00 EUV Lithography (A5)

Chairman:Hiroto Kudoh(Kansai University), Hiroaki Oizumi(GIGAPHOTON Inc.)

14:10 〜 14:30

[2A509] Development of Selenonium PAGs in EUV Lithography toward High Sensitivity Achievement

*Tomohito Kizu1, Shinji Yamakawa2, Takeo Watanabe2, Seiji Yasui1, Tomoyuki Shibagaki1 (1. San-Apro Ltd., 2. Laboratory of Advanced Science and Technology for Industry, University of Hyogo)