The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

EUV Lithography

[2A508-13] EUV Lithography III

2022年6月29日(水) 13:50 〜 16:00 EUV Lithography (A5)

Chairman:Hiroto Kudoh(Kansai University), Hiroaki Oizumi(GIGAPHOTON Inc.)

14:50 〜 15:20

[2A511] Recent Research activity for EUV Lithography at QST [Invited]

*Hiroki YAMAMOTO Yamamoto1, Yuji Hosaka1, Kimio Yoshimura1, Masahiko Ishino1, Dinh Thanhhung1, Masaharu Nishikino1, Yasunari Maekawa1 (1. National Institutes for Quantum Science and Technology)