The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

EUV Lithography

[2A508-13] EUV Lithography III

2022年6月29日(水) 13:50 〜 16:00 EUV Lithography (A5)

Chairman:Hiroto Kudoh(Kansai University), Hiroaki Oizumi(GIGAPHOTON Inc.)

15:20 〜 15:50

[2A512] Effect of alternative developer solutions on EUVL patterning [Invited]

*JULIUSJOSEPH SANTILLAN1, TOSHIRO ITANI1 (1. Osaka University)