The 39th International Conference of Photopolymer Science and Technology

講演情報

Computational / Analytical Approach for Lithography Processes

[A4] Computational / Analytical Approach for Lithography processes

2022年6月30日(木) 09:00 〜 11:30 Computational / Analytical Approach for Lithography Processes (A4)

Chairman:Tomoki Nagai(JSR Corporation), Takahiro Kozawa(Osaka University)

11:00 〜 11:30

[3A405] Bottom-up Multiscale Approach to Predict Physical Properties of Polymer Melts [invited]

*Kenji Yoshimoto1 (1. Toray Industries, Inc.)