ICSCRM2019

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Oral Presentation

Characterization and Defect Engineering

[Fr-1B] Novel Materials and Concepts

Fri. Oct 4, 2019 8:45 AM - 10:00 AM Annex Hall 2 (Kyoto International Conference Center)

9:15 AM - 9:30 AM

[Fr-1B-02] Deep Level Study of Chlorine-based Dry Etched beta-Ga2O3

*Giovanni Alfieri1, Philippe Godignon2, Andrei Mihaila1, Lasse Vines3 (1. ABB(Switzerland), 2. CNM(Spain), 3. Oslo Univ.(Norway))