ICSCRM2019

講演情報

印刷

Oral Presentation

Characterization and Defect Engineering

[Fr-1B] Novel Materials and Concepts

2019年10月4日(金) 08:45 〜 10:00 Annex Hall 2 (Kyoto International Conference Center)

09:15 〜 09:30

[Fr-1B-02] Deep Level Study of Chlorine-based Dry Etched beta-Ga2O3

*Giovanni Alfieri1, Philippe Godignon2, Andrei Mihaila1, Lasse Vines3 (1. ABB(Switzerland), 2. CNM(Spain), 3. Oslo Univ.(Norway))