[Mo-2A] Oxidation and Nitridation

[Mo-2A-02] Investigation of SiC Microwave Plasma Oxidation Kinetics via Oxygen Isotope Labelling

*Nannan You^1,2, Shengkai Wang^1,2, Jilong Hao^1,2, Yun Bai^1,2, Xinyu Liu^1,2 (1. Institute of Microelectronics of the Chinese Academy of Sciences(China), 2. University of Chinese Academy of Sciences(China))