ICSCRM2019

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Oral Presentation

Growth and Wafer Manufacturing

[Mo-2B] 3C-hetero-epitaxy

Mon. Sep 30, 2019 2:15 PM - 3:30 PM Annex Hall 2 (Kyoto International Conference Center)

3:00 PM - 3:15 PM

[Mo-2B-04] Exploration of Solid Phase Epitaxy of 3C-SiC on Silicon

*Marcin Zielinski1, Sylvain Monnoye1, Hugues Mank1, Frank Torregrosa2, Gregory Grosset2, Yohann Spiegel2, Marc Portail3, Adrien Michon3 (1. NOVASiC(France), 2. IBS(France), 3. CNRS-CRHEA, UCA Univ.(France))