ICSCRM2019

講演情報

印刷

Oral Presentation

Growth and Wafer Manufacturing

[Mo-2B] 3C-hetero-epitaxy

2019年9月30日(月) 14:15 〜 15:30 Annex Hall 2 (Kyoto International Conference Center)

15:00 〜 15:15

[Mo-2B-04] Exploration of Solid Phase Epitaxy of 3C-SiC on Silicon

*Marcin Zielinski1, Sylvain Monnoye1, Hugues Mank1, Frank Torregrosa2, Gregory Grosset2, Yohann Spiegel2, Marc Portail3, Adrien Michon3 (1. NOVASiC(France), 2. IBS(France), 3. CNRS-CRHEA, UCA Univ.(France))