[Mo-P] Poster Presentation

[Mo-P-15] More Insights in Silicon Carbide Material Quality with Advanced X-Ray Topography Imaging

*Roland Weingaertner¹, Birgit Kallinger¹, Thomas Wicht¹, Patrick Berwian¹, Christian Kranert¹, Christian Reimann¹, Elke Meissner¹, Jürgen Gräßlin², Uwe Preckwinkel², Jochen Friedrich¹ (1. Fraunhofer Institute for Integrated Systems and Device Technology IISB, Schottkystraße 10, 91058 Erlangen(Germany), 2. Rigaku Europe SE, Hugenottenallee 167, 63263 Neu-Isenburg(Germany))