[Mo-P] Poster Presentation

[Mo-P-16] Nondestructive Inspection of Defects in SiC substrates and Epitaxial Layer by Phase Contrast Microscope

*Ryo Hattori¹, Osamu Oku², Kazutsugu Murakami¹, Masaaki Kuzuhara³ (1. Ceramic Forum Co.,Ltd(Japan), 2. Micro-world Servics(Japan), 3. Univ. of Fukui(Japan))