[Mo-P] Poster Presentation

[Mo-P-17] Automated defect recognition in 4H-SiC substrates, epiwafers, and partially processed wafers

*Birgit Kallinger¹, Katharina Roßhirt-Lilla¹, Patrick Berwian¹, Steffen Oppel², Simon Steurer², Heino Möller² (1. Fraunhofer IISB(Germany), 2. INTEGO GmbH(Germany))