[Mo-P] Poster Presentation

[Mo-P-22] Depth Analysis of Al-implanted 4H-SiC by Confocal Raman Microscopy

*Ying Song¹, Zong Wei Xu¹, Tao Liu¹, Mathias Rommel², Hong Wang³, Feng Zhou Fang¹ (1. State Key Lab. of Precision Measuring Tech. & Instruments, Centre of Micro/Nano Manufacturing Tech. Tianjin Univ. (China), 2. Fraunhofer Inst. for Integrated Systems and Device Tech.(Germany), 3. State Key Lab. of Separation Membranes and Membrane Processes, School of Materials Sci. and Engineering, Tianjin Polytechnic Univ.(China))