スケジュール 3 15:45 〜 17:45 [Mo-P-28] Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si *Fan Li1, Song Qiu1, Mike Jennings2, Phil Mawby1 (1. Univ. of Warwick (UK), 2. Swansea Univ.(UK))