ICSCRM2019

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Poster Presentation

Poster Presentation

[Mo-P] Poster Presentation

Mon. Sep 30, 2019 3:45 PM - 5:45 PM Annex Hall 1 (Kyoto International Conference Center)

3:45 PM - 5:45 PM

[Mo-P-36] Investigating POCl3 Annealing for SiC Power MOSFETs

*Yanrui Ju1, Bouvet Bouvet2, Roger Stark1, Judith Wörle1, Ulrike Grossner1 (1. ETH Zurich(Switzerland), 2. École Polytechnique Fédérale de Lausanne(Switzerland))