ICSCRM2019

講演情報

印刷

Poster Presentation

Poster Presentation

[Mo-P] Poster Presentation

2019年9月30日(月) 15:45 〜 17:45 Annex Hall 1 (Kyoto International Conference Center)

15:45 〜 17:45

[Mo-P-36] Investigating POCl3 Annealing for SiC Power MOSFETs

*Yanrui Ju1, Bouvet Bouvet2, Roger Stark1, Judith Wörle1, Ulrike Grossner1 (1. ETH Zurich(Switzerland), 2. École Polytechnique Fédérale de Lausanne(Switzerland))