Schedule 4 3:45 PM - 5:45 PM [Mo-P-55LN] Study on the Influence of Si implantation on the Surface of SiC DIMOS *Jheng-Yi Jiang1, Jia-Qing Hung1, Pin-Wei Huang1, Tian-Li Wu2, Chih-Fang Huang1 (1. National Tsing Hua University(Taiwan), 2. National Chiao Tung University(Taiwan))