[Mo-P] Poster Presentation

[Mo-P-55LN] Study on the Influence of Si implantation on the Surface of SiC DIMOS

*Jheng-Yi Jiang¹, Jia-Qing Hung¹, Pin-Wei Huang¹, Tian-Li Wu², Chih-Fang Huang¹ (1. National Tsing Hua University(Taiwan), 2. National Chiao Tung University(Taiwan))