ICSCRM2019

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Oral Presentation

MOS Gate Stacks and Device Processing

[Th-2A] Device Processing

Thu. Oct 3, 2019 10:45 AM - 12:15 PM Room A (Kyoto International Conference Center)

11:15 AM - 11:30 AM

[Th-2A-02] Current transport mechanisms in Au-free metallizations for CMOS compatible GaN HEMT technology

*Fabrizio Roccaforte1, Monia Spera1,2,3, Salvatore Di Franco1, Corrado Bongiorno1, Raffaella Lo Nigro1, Patrick Fiorenza1, Filippo Giannazzo1, Giuseppe Greco1 (1. CNR-IMM(Italy), 2. University of Catania(Italy), 3. University of Palermo(Italy))