[Th-2B] Alternative Bulk Growth

[Th-2B-05] Threading Screw Dislocations Conversion and Suppression of Inclusions in 3-inch 4° off-axis C-face 4H-SiC Solution Growth with Pure Si

*TAKAMA UNNO¹, CAN ZHU², SHUNTA HARADA^1,2, HARUHIKO KOIZUMI^2,4, MIHO TAGAWA^1,2, TORU UJIHARA^1,2,3 (1. Department of Materials Process and Eng., Nagoya Univ.(Japan), 2. Center for Integrated Res. of Future Electronics (CIRFE), Inst. of Materials and System for Sustainability (IMaSS), Nagoya Univ.(Japan), 3. GaN Advanced Device Open Innovation Lab. (GaN-OIL), National Inst. of Advanced Indus. Sci. and Tech. (AIST)(Japan), 4. Department of Electorical and Electronic Eng., Mie Univ.(Japan))