ICSCRM2019

Presentation information

Poster Presentation

Poster Presentation

[Th-P] Poster Presentation

Thu. Oct 3, 2019 1:45 PM - 3:45 PM Annex Hall 1 (Kyoto International Conference Center)

1:45 PM - 3:45 PM

[Th-P-06] Improvement of repeatability on N-type 4H-SiC epitaxial growth by high speed wafer rotation vertical CVD tool

*Yoshiaki Daigo1, Akio Ishiguro1, Shigeaki Ishii1, Takehiko Kobayashi1, Yoshikazu Moriyama1 (1. NuFlare Technology, Inc.,(Japan))