[Th-P] Poster Presentation

[Th-P-11] Characterization of Prismatic Stacking Faults of Carrot Defects in 4H-SiC Epi Wafer

*Hideki Sako^1,3, Kenji Kobayashi², Kentaro Ohira³, Toshiyuki Isshiki³ (1. Toray Research Center, Inc.(Japan), 2. Hitachi High-Technologies Corp.(Japan), 3. Kyoto Institute of Technology(Japan))