Schedule 4 1:45 PM - 3:45 PM [Th-P-16] Defect Detection in SiC Device Processes using a Mirror Electron Microscope Inspection System *Keiko Masumoto1, Junji Senzaki1, Masaki Hasegawa2, Kentaro Ohira2, Kazutoshi Kojima1, Kenji Kobayashi2, Hajime Okumura1 (1. National Inst. of Advanced Indus. Sci. and Tech.(Japan), 2. Hitachi High-Technologies Corp.(Japan))