ICSCRM2019

Presentation information

Poster Presentation

Poster Presentation

[Th-P] Poster Presentation

Thu. Oct 3, 2019 1:45 PM - 3:45 PM Annex Hall 1 (Kyoto International Conference Center)

1:45 PM - 3:45 PM

[Th-P-19] Comparative results of low-temperature annealing of lightly doped n-layers of silicon carbide irradiated by protons and electrons

Vitali V. Kozlovski1, Oleg Korolkov2, Alexander A. Lebedev3, Jana Toompuu2, *Natalja Sleptsuk2 (1. Peter the Great St. Petersburg Polytechnic University(Russia), 2. Tallinn University of Technology(Estonia), 3. Ioffe Institute(Russia))