[Th-P] Poster Presentation

[Th-P-51LN] Nondestructive depth distribution measurements of carrier lifetime in 4H-SiC thick epitaxial layers with high spatial resolution

*Takashi Hirayama¹, Keisuke Nagaya¹, Akira Miyasaka², Kazutoshi Kojima³, Tomohisa Kato³, Hajime Okumura³, Masashi Kato¹ (1. Nagoya Inst.(Japan), 2. Showa Denko(Japan), 3. AIST(Japan))