スケジュール 2 13:45 〜 15:45 [Th-P-52LN] Accurate Channel Mobility Extraction and Scattering Mechanisms in 4H-SiC p-Channel MOSFETs *XINGYAN ZHOU1, Dai Okamoto1, Xufang Zhang1, Mitsuru Sometani2, Mitsuo Okamoto2, Shinsuke Harada2, Noriyuki Iwamuro1, Hirosi Yano1 (1. Tsukuba Univ.(Japan), 2. National Inst. of Advanced Indus. Sci. and Tech.(Japan))