[Tu-1B] Extended Defects I

[Tu-1B-03] Synchrotron X-ray Topography Study on the Relationship between Local Basal Plane Bending and Basal Plane Dislocations in PVT-grown 4H-SiC Substrate Wafers

*Tuerxun Ailihumaer¹, Balaji Raghothamachar¹, Michael Dudley¹, Gil Chung², Ian Manning², Edward Sanchez² (1. Stony Brook Univ.(United States of America), 2. Dupont Co.(United States of America))