ICSCRM2019

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Oral Presentation

Characterization and Defect Engineering

[Tu-1B] Extended Defects I

Tue. Oct 1, 2019 8:45 AM - 10:15 AM Annex Hall 2 (Kyoto International Conference Center)

9:45 AM - 10:00 AM

[Tu-1B-04] Analysis of Prismatic Dislocations in 4H-SiC Crystals by Multiple-beam Diffraction Topography

*Isaho Kamata1, Norihiro Hoshino1, Yuichiro Tokuda2, Takahiro Kanda2, Naohiro Sugiyama2, Hironari Kuno2, Hidekazu Tsuchida1 (1. Central Res. Inst. of Electric Power Industry (CRIEPI)(Japan), 2. DENSO CORPORATION(Japan))