[Tu-1B] Extended Defects I

[Tu-1B-05] Lattice Plane Distortions Introduced by Epilayer Growth of SiC wafers

*Nadeemullah A Mahadik¹, Robert E Stahlbush¹, Stanislav Stoupin², Hrishikesh Das³, Peter Bonanno¹, Albert Macrander⁴ (1. Naval Research Laboratory(United States of America), 2. Cornell High Energy Synchrotron Source, Cornell Univ.(United States of America), 3. On Semiconductor(United States of America), 4. Argonne National Lab.(United States of America))