Investigation of Dislocation Behavior at the Early Stage of PVT-grown 4H-SiC Crystals

Tuerxun Ailihumaer

Presentation information

Oral Presentation

Growth and Wafer Manufacturing

[Tu-2B] Sublimation Bulk Growth

Tue. Oct 1, 2019 10:45 AM - 12:30 PM Annex Hall 2 (Kyoto International Conference Center)

12:15 PM - 12:30 PM

[Tu-2B-06LN] Investigation of Dislocation Behavior at the Early Stage of PVT-grown 4H-SiC Crystals

*Tuerxun Ailihumaer¹, Balaji Raghothamachar¹, Michael Dudley¹, Gilyong Chung², Ian Manning², Edward Sanchez² (1. Stony Brook Univ.(United States of America), 2. DuPont Inc.(United States of America))

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