[Tu-P] Poster Presentation

[Tu-P-01] 3C-SiC Bulk Growth: Effect of Growth Rate and Doping on Defects and Stress

*Francesco La Via¹, Marco Mauceri², Cristiano Calabretta¹, Massimo Zimbone¹, Ruggero Anzalone³ (1. CNR-IMM(Italy), 2. LPE(Italy), 3. STMicroelectronics(Italy))