[Tu-P] Poster Presentation

[Tu-P-18] Crystalline quality evaluation of SiC p/n column layers formed by trench-filling-epitaxial growth

*Kohei Adachi^1,2, Ryoji Kosugi¹, Shiyang Ji¹, Yasuyuki Kawada^1,3, Hiroyuki Fujisawa^1,3, Shingo Tomohisa², Naruhisa Miura², Yoshiyuki Yonezawa¹, Hajime Okumura¹ (1. National Institute of Advanced Industrial Science and Technology(Japan), 2. Mitsubishi Electric Corp.(Japan), 3. Fuji Electric Co., Ltd.(Japan))