ICSCRM2019

講演情報

Poster Presentation

Poster Presentation

[Tu-P] Poster Presentation

2019年10月1日(火) 16:15 〜 18:15 Annex Hall 1 (Kyoto International Conference Center)

16:15 〜 18:15

[Tu-P-19] Impact of threading dislocations detected by KOH etching on 4H-SiC 650 V MOSFET device failure after reliability test

*Andrea Severino1, Ruggero Anzalone1, Nicolo' Piluso1, Cirino Rapisarda1, Alfio Russo1, Beatrice Carbone1, Santi Alessandrino1, Salvo Coffa1 (1. STMicroelectronics(Italy))