[Tu-P] Poster Presentation

[Tu-P-20] Structural Characterization of a Ga₂O₃ Epitaxial Layer Grown on a Sapphire Substrate using Cross-sectional and Plan-view TEM/STEM analysis

*Ai Hashimoto¹, Hideki Sako¹, Junichiro Sameshima¹, Yuji Otsuka¹, Masayuki Nakamura², Takayuki Kobayashi², Shinichi Motoyama² (1. Toray Research Center, Inc.(Japan), 2. Samco Inc.(Japan))