ICSCRM2019

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Poster Presentation

Poster Presentation

[Tu-P] Poster Presentation

Tue. Oct 1, 2019 4:15 PM - 6:15 PM Annex Hall 1 (Kyoto International Conference Center)

4:15 PM - 6:15 PM

[Tu-P-21] Damage characterization of GaN substrate with hot implant process

*Junko Maekawa1, Hitoshi Kawanowa1, Masahiko Aoki1, Katsumi Takahiro2, Toshiyuki Isshiki2 (1. Ion Tech. Center Co.,Ltd(Japan), 2. Kyoto Inst. of Tech.(Japan))