[Tu-P] Poster Presentation

[Tu-P-23] AFM observation of echi-pit shapes on β-Ga₂O₃ (001) surface formed by molten alkali etching

*Kenichi Ogawa¹, Naoya Ogawa¹, Ryo Kosaka¹, Toshiyuki Isshiki¹, Toru Aiso², Masato Iyoki², Yongzhao Yao³, Yukari Ishikawa³ (1. Kyoto Institute of Technology(Japan), 2. Hitachi High-Technologies Corp.(Japan), 3. Japan Fine Ceramics Center(Japan))