[Tu-P] Poster Presentation

[Tu-P-29] Phosphorous Ion Implantation for 4H-SiC DMOSFETs Source/Drain

*Roberta Nipoti¹, Antonella Parsini², Virginia Boldrini¹, Salvatore Vantaggio², Marco Gorni², Maria Concetta Canino¹, Michele Bellettato¹, Massimo Camarda³, Judith Woerle³, Ulrike Grossner⁴ (1. CNR-IMM unit of Bologna(Italy), 2. Univ. of Parma, DMPCS - CNISM(Italy), 3. PSI, Villigen(Switzerland), 4. ETH Zurich, APS(Switzerland))