[Tu-P] Poster Presentation

[Tu-P-41] On-resistance Improvement of SiC MOSFETs by Buried Ion Implantation in JFET Regions

*LI ZHENG¹, Qian Wang¹, Xinhong Cheng^1,2, Shaoyu Liu¹, Dawei Xu¹, Lingyan Shen¹, Tomasz Sledziewski³, Tobias Erlbacher³, Yuehui Yu^1,2 (1. Shanghai Inst. of Microsystem and Info. Tech., Chinese Academy of Sciences(China), 2. Center of Materials Sci. and Optoelectronics Engineering, Univ. of Chinese Academy of Sciences(China), 3. Fraunhofer Inst. for Integrated Systems and Device Technology(Germany))