ICSCRM2019

講演情報

Poster Presentation

Poster Presentation

[Tu-P] Poster Presentation

2019年10月1日(火) 16:15 〜 18:15 Annex Hall 1 (Kyoto International Conference Center)

16:15 〜 18:15

[Tu-P-51LN] GaN epitaxial growth on 4 degree off-axis Si- and C-face 4H-SiC without buffer layer by tri-halide vapor phase epitaxy

*KAZUKUNI HARA1,2, Junji Ohara1, Daisuke Uematsu1, Shoichi Onda2 (1. DENSO Corp.(Japan), 2. Nagoya Univ.(Japan))