ICSCRM2019

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Oral Presentation

Growth and Wafer Manufacturing

[We-2B] 4H-homo-epitaxy

Wed. Oct 2, 2019 10:45 AM - 12:15 PM Annex Hall 2 (Kyoto International Conference Center)

11:15 AM - 11:30 AM

[We-2B-02] Revisiting the site-competition doping of 4H-SiC: cases of N and Al

*Gabriel Ferro1, Didier Chaussende2 (1. Lab. LMI, Lyon Univ.(France), 2. Lab. SIMAP, Grenoble Univ.(France))