ICSCRM2019

講演情報

印刷

Oral Presentation

Growth and Wafer Manufacturing

[We-2B] 4H-homo-epitaxy

2019年10月2日(水) 10:45 〜 12:15 Annex Hall 2 (Kyoto International Conference Center)

11:15 〜 11:30

[We-2B-02] Revisiting the site-competition doping of 4H-SiC: cases of N and Al

*Gabriel Ferro1, Didier Chaussende2 (1. Lab. LMI, Lyon Univ.(France), 2. Lab. SIMAP, Grenoble Univ.(France))