[We-3B] Fundamental Physics and Measurement Techniques

[We-3B-06] Lifetime limiting substrate originated deep level defects in 4H-SiC epilayers

*Juergen Erlekampf¹, Birgit Kallinger¹, Mathias Rommel¹, Patrick Berwian¹, Jochen Friedrich¹, Tobias Erlbacher¹ (1. Fraunhofer IISB, Schottkystr. 10, 91058 Erlangen(Germany))