Schedule 3 4:15 PM - 6:15 PM [We-P-08] Cost-efficient High-throughput Polishing of Silicon Carbide Seed Crystals Artem Titov1, *Alicia Walters1, Tsutomu Shindo2, Hirokazu Sasai2 (1. Engis Corp.(United States of America), 2. Engis Japan Corp.(Japan))
