ICSCRM2019

講演情報

Poster Presentation

Poster Presentation

[We-P] Poster Presentation

2019年10月2日(水) 16:15 〜 18:15 Annex Hall 1 (Kyoto International Conference Center)

16:15 〜 18:15

[We-P-09] Reducing On-Resistance for SiC Diodes by Thin Wafer and Laser Anneal Technology

*Oleg Rusch1, Carsten Hellinger1, Jonathan Moult2, Yunji Corcoran2, Tobias Erlbacher1,3 (1. Fraunhofer Institute for Integrated Systems and Device Technology IISB(Germany), 2. SMC Diode Solutions, Sangdest Microelectronics(China), 3. Chair of Electron Devices, Friedrich-Alexander-Universität Erlangen-Nürnberg(Germany))